摘要
Using collection film technique combined with Auger electron spectroscopy is analysis, the preferential sputtering of the ternary alloy Cu76Ni15Sn9 bombarded with 27 keV Ar+ at normal incidence is studied. After bombardment, the target surfaCe is examined with SEM, and the surface composition of different topographical feature areas is measured with electron probe micrthanalyser (EPMA). The experiment results show that Cu atoms are preferentially ejected compared with Ni atoms, and Sn atoms come third within the ejection angle range from 0° to 60°. The results are discussed from the viewpoint of sputtering from a very rough surface.
