摘要
The design of a small complex-type focussed magnetron with a long target-life used for excited multi-atoms beam film deposition in hard coatings is described.The magnetron tunnel of the magentron source was constructed by a planar unbalanced magnetic annulus,which comes from the extended co-axial magnetron principle and inside cylindrical magnet tunnel.The use efficinecy of inside circular cone sputtering target area is high up to 62%.The inside-inversion cone sputtering target has a long life and results in a higher deposition rate 35nm/min for Ti at a 2.5Pa Ar pressure.A better focussing direction of ejecting atom beam has been achieved,and the are power input is 300W for Ti target.
