Penetration depth and concentration distribution for implanted heavy ions with low energies in plant seeds by SEM and EDS

The penetration depth and concentration distribution of implanted ions have been studied for low energy heavy ions implanted in the dry seeds of plant, such as peanut, mung beau, sunflower, wheat and radish seeds, etc. by SEM+EDS. The results .how that the maximum penetration depth is about 12μm for V+ with an energy 200 keV implanted in cotyledon of the peanut, 18pm, spin, 20μm for V2+ with 90 keV implanted in sunflower, wheat, radish seeds, respectively. The penetration depth of implanted Cu2+ with 80 keV is about 90μm in the remainder funicle derivative of the mung beau seeds. The experimental result of the maximum penetration depth of implanted V+ in the peanut seeds was compared with the calculated value of the TRIM95.