摘要
提出了一种体硅微加速度计的设计和制造方法,同时设计了它的闭环反馈伺服电路,分析了加速度计的质量块、悬臂梁和梳尺间隙对量程、非线性、灵敏度、抗冲击能力和带宽等特性的影响。已经加工出的微加速度计,其全量程为±60g,非线性度0.2%,带宽1kHz,灵敏度200mV/g,抗冲击能力10kg。对由加速度计结构设计、温度和伺服电路造成的零位漂移现象进行了分析,提出了一种制造微加速度计的新颖MEMS工艺———正面释放体硅工艺。
A bulk-silicon micro-accelerometer and its closed loop feedback servo-circuit are pre-sented.In this paper,the effects of mass,beam and gap on full-scale range,nonlinearity,sensi-tivity,shock survival and bandwidth are analyzed.The micro-accelerometer was successfully fabri-cated with±60g full-scale range,0.2%nonlinearity,1kHz bandwidth,200mV/g sensitivity,10kg shock survival.Bias stability caused by structure,temperature and servo-circuit of the accelero-meter are analyzed.A novel MEMS process,called frontside-release bulk-silicon process is pro-posed.
出处
《微纳电子技术》
CAS
2002年第11期25-28,共4页
Micronanoelectronic Technology
