Studies of preparing method of nano grain metal-insulator film Cu:CaF_2

Ｓｔｕｄｉｅｓｏｆｐｒｅｐａｒｉｎｇｍｅｔｈｏｄｏｆｎａｎｏｇｒａｉｎｍｅｔａｌ－ｉｎｓｕｌａｔｏｒｆｉｌｍＣｕ：ＣａＦ_２ＺｈａｏＺｉ－Ｑｉａｎｇ（赵子强），ＷｅｉＬｕｎ－Ｃｕｎ（韦伦存），ＷａｎｇＨａｏ（王浩），ＺｈｏｎｇＹｕｎ－Ｃｈｅｎｇ（钟运?..

A machine to prepare nano grain metal-insulator films,for example Cu:CaF2film,by means of magnetron sputtering generating clusters and at the same time evaporatinginsulator medium, is introduced.This machine is suitable for almost all solid metal andsemiconductor clusters.And with it,many kinds of function film series can be prepared.Thesize of cluster embedded in insulator is from 10 to 70urn.The Cu cluster and medium CaFZare both polycrystalline structure.