摘要
Three kinds of 'films' i.e. cross-linked film, grainy film and transparent film, wereobtained in the process of plasma polymerization of Octamethylcyclotetrasioxane(D4) under dif-ferent conditions. From SEM photos, we can see that the cross-linked film has a network form.From XPS spectra, we can see that the content of Si-C bond of the cross-linked film is lower thanthat of the transparent film, and this result agrees well with the test results of FTIR spectra. Thisproves that the c1eavage of the Si-C bond and C-H bond are the main cleavage in the formationof cross-linked film, whereas the cleavage of the Si-O is the main cleavage in the formation oftransparent film. In order to enhance the collision of the reactive particles and investigate theinfluence of magnetic field on the plasma polymerization, we introduced the magnetic field, as aresult, we got the grainy film.
Three kinds of 'films' i.e. cross-linked film, grainy film and transparent film, wereobtained in the process of plasma polymerization of Octamethylcyclotetrasioxane(D4) under dif-ferent conditions. From SEM photos, we can see that the cross-linked film has a network form.From XPS spectra, we can see that the content of Si-C bond of the cross-linked film is lower thanthat of the transparent film, and this result agrees well with the test results of FTIR spectra. Thisproves that the c1eavage of the Si-C bond and C-H bond are the main cleavage in the formationof cross-linked film, whereas the cleavage of the Si-O is the main cleavage in the formation oftransparent film. In order to enhance the collision of the reactive particles and investigate theinfluence of magnetic field on the plasma polymerization, we introduced the magnetic field, as aresult, we got the grainy film.
