摘要
利用正交实验法研究相关因素对ORMOSILS(有机改性硅酸盐材料)薄膜成膜性的影响, 并通过调整陈化时间以优化复制工艺。与光敏胶微光学元件相比,复制出的微光学元件光学性能、力学性能有了较大的改善。
The influence of the correlative factors on ORMOSILS thin film generating property is studied by means of orthogonal experimental method and the replication process is optimized through adjusting ageing time. Compared with the micro-optical elements made of photosensitive glue, the optical performance and mechanical performance of the replicated micro-optical elements has a large improvement.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2002年第5期25-29,共5页
Opto-Electronic Engineering
