WDM用微镜片分光膜的镀制

Coating of Beam Splitting Thin Film on Micro-Lens Used in WDM

主要介绍了光纤波分复用(WDM)中用的分光膜的批量镀制工艺。在大量实验基础上,对 比不同膜系及膜料的选择,重点介绍了工艺流程中的镀制、监控、检测等主要环节。制备的微镜片性能稳定,已经完全达到用户的需求。

The technology for batch-coating beam splitting thin film used in wavelength division multiplexing (WDM) of optic fiber is presented. On the basis of large numbers of experiments, comparing the different film systems and the selection of film materials, the main links such as coating, monitoring and inspecting of thin films during the technological process are emphatically introduced. The property of the prepared micro-lens is stable and they have fully fulfilled the users' demand.