光电信号的高精度数字处理模型研究

Investigation of High Precision Digital Processing Model on Some Optoelectronic Signal

针对膜厚控制系统中的双路光电信号的数字处理和控制分析问题 ,将传统的数字处理技术进行修正和优化 ,提出了一套高精度数字处理模型和方案 ,测试实验表明该方案合理可靠 ,而且大大提高了膜厚监控系统的稳定性、精度。

To the digital processing and analysis on dual-optical path optoelectronic signals in thin-film thickness monitoring control system, the traditional digital processing technology are revised and made optimum. The high precision digital processing model and plan are proposed. The experimental results are obtained with reasonability and reliability of this plan, as well as, the stability and precision are more increased in thin-film thickness monitoring control system.