摘要
大规模集成电路单晶硅片制作过程中需要大量的相关材料和化学品;其中需要大量的高纯和超净化学试剂,即微电子化学试剂,又称MOS试剂。本文对微电子化学试剂的市场及其开发应用的进展作了简单介绍。
The manufacturing of the large integrated circuit Si wafer needs a large quantity of related materials and chemicals, among them is the super clean and pure chemical reagents, that is micron electric chemical reagent of MOS Reagent. The brief illustration on the development and market of micron electric chemical reagent is given hereby.
出处
《上海化工》
CAS
2002年第21期22-24,28,共4页
Shanghai Chemical Industry
