微结构谐振传感器

MICRORESONATOR SENSORS

阐述了频率输出的新型谐振传感器的发展方向之一——微型化。评价性地论述了热激励硅谐振压力传感器和热激励谐振膜质量流量传感器。重点讨论了热激励的原理,特点等。指出我国应对传感器的这一发展趋势给予足够的重视。

This paper expounds the microminiaturization of new resonator sensor with freqency output,which is one of the developing tendencies.It gives an exposition of the thermally excited silicon resonator pressure sensor and the thermally excited resonating membrane mass flow sensor.Especially,it discusses the operating principle and characteristics for the thermally excited sensors.And it points out this tendency of sensor should be noticed considerable at home.