广义位移传感器在形状误差和误差运动分离中的读数贡献

Reading contributions of generalized displacement sensors in the separation of form error and error motions

详细推导并统一了形状误差和误差运动高精度检测 分离技术中各类传感器的读数方程 ,包括传统的差动变压器式位移传感器、电涡流式位移传感器、电容式微位移传感器和近年来出现的激光微位移传感器、激光角位移传感器以及后两者组合成的组合式广义位移传感器。以统一的列表方式阐明了各传感器的读数贡献。其优点是 :根据选用的误差分离方法和与之适配的传感器 ,便可按列表方式快速、方便地排出用于直线、圆、圆柱度和平面度等误差分离的原始读数方程 。

In the process of high precision measurement and separation of form error and error motions, the readings are different with the variance of sensor types. Reading equations of different sorts of sensors are derived elaborately and united together, including not only ordinary inductance type displacement sensor, electric eddy type displacement sensor, capacitance type micro displacement sensor, but also up to date laser micro displacement sensor, laser angular displacement sensor and combined type generalized displacement sensor consisting of the above two. Moreover, the reading contributions of these sensors are expounded by means of uniform listing. This will bring about obvious merits, that is, according to the selected error separation methods and corresponding sensors, original reading equations for different methods such as straightness, roundness, cylindricity and flatness error separations can be obtained conveniently and rapidly on the basis of these lists, so the feasibility of error separations can be analyzed primarily.