电子回旋共振等离子体用于聚四氟乙烯材料表面改性

Surface Modification of Polytetrafluoroethylene Film with Electron Cyclotron Resonance Plasma

在电子回旋共振 (ECR)等离子体装置中 ,使用Ar气 ,N2 气 ,H2 气和普通空气放电 ,对聚四氟乙烯 (PTFE)材料进行表面处理以提高其表面粘结性能。详细研究了在不同的放电气压 ,微波功率 ,处理时间 ,气体种类的情况下 ,样品表面的接触角的变化。同时也讨论了样品导电性能和外观等的变化。使用红外吸收谱对样品结构处理前后的变化进行了测量 ,对等离子体处理的机理进行了初步的讨论。使用Langmuir探针测量了Ar气和N2 气等离子体中的离子密度 ,用能量分析器测量了离子的能量。发现在对样品的处理中 ,ECR等离子体的离子密度是影响表面性能的主要因素 。

The surface adhesion of the Polytetrafluoroethylene (PTFE) film was significantly improved by surface modification with electron cyclotron resonance (ECR) plasma,produced through discharging of either one of the four gases,such as argon,nitrogen,hydrogen and air.Influence of processing conditions on the contact angle of the sample,such as gas pressure,microwave power,processing time and type of reaction gas,was studied.Changes in the surface conductivity were discussed.The structural changes were measured with infrared absorption spectroscopy.We found that ion density strongly improves the surface adhesion,whereas the influence of ion energy on surface adhesion is negligible.