利用脉冲调制电子探束测量电子诱导脱附阈值能量

Measurement of Threshold Energy of Electron-stimulated Desorption by Pulse-modulated Electron Beam

本文介绍脉冲调制电子探束测量电子诱导脱附阈值能量方法的原理 ,同时给出该法进行电子诱导脱附阈值能量测量的实验及结果。与传统的直流电子探束测量电子诱导脱附阈值能量的方法相比 ,使得测量设备简化的同时 ,有效地提高测量的准确性和精度 ,使电子诱导脱附阈值能量的测量拓展到高真空的范围。

The threshold energy of the electron stimulated desorption was successfully measured by means of the pulse modulated electron beam.The advantages of the new technique over the conventional measurement using dc electron beams include much higher accuracy,easier operation and simpler intrumentation.Moreover,the measurement can be performed in high vacuum as well.