从光电子谱的峰背比及背景信号变化获得成分深度分布信息

Depth Profile from the P/B Ratio and the Dependence of the Background Signal on Binding Energy of X-ray Photoelectron

光电子谱中的背景信号包含样品的信息 ,但过去往往被忽略。通过对背景信号简单的分析 ,可以获得成分随深度变化的信息。本文介绍了如何利用光电子谱的背景信号获得元素在深度方向的分布情况。本文所述方法可以用于纳米镶嵌结构、包裹物、表面偏析、氧化。

The background signal of the X\|ray photoelectron spectrum contains information of sample,though it was not used until recently.Through very simple analysis,useful depth profile information can be obtained.This paper gives an brief introduction of the background in XPS,and the way of using the P/B ratio and the dependence of the B\|E to get useful depth profile information.This method could be used in cases concerning depth profile of nano\|meter scale,such as surface segregation,oxidation,passivation,and embedded system,etc.