高纯四氯化硅生产尾气的处理工艺

Study on Trentment Technology of Containing Pypocholoride in the Process of High Purity Silicon Tetrachloride

文章提出了一种利用亚硫酸钠和氢氧化钠混合溶液处理高纯四氯化硅生产中产生的含氯尾气的处理工艺,该工艺可深度去除高纯四氯化硅生产过程产生的多组分尾气的次氯酸盐成分。检测结果表明处理尾气产生的废水次氯酸根离子浓度去除率可达到98.7%,反应后的混合液不产生氯气。该工艺具有流程简单、可连续化操作、处理量大、适用性强等特点。完全可以满足高纯四氯化硅生产工艺中尾气处理的要求。

This article demonstrated a technology for treating tail gas containing clo-in the process of high purity silicon tetrachloride,that using Na2SO3 and NaOH as solution.This technology can remove ClO-easily and effectively.The content of ClO-can be removed almost 98.7%,and the solution after react have no Cl2 totally.This technology has those advantages of simple process,continuous operation,flexibility and so on,can meet the requirement of tail gas treating in the process of high purity silicon tetrachloride.