摘要
CVD涂层设备反应炉温度由加热罩控制。在CVD设备上对加热罩的不同的温控参数和不同工艺设计的加热罩进行刀片涂层实验对比,研究其不同点对刀片涂层质量的影响。研究表明,温度PID参数影响涂层刀片产品的质量,温度波动太大将导致膜厚不均匀;加热罩工艺设计虽然在控温上合格后不一定直接影响涂层质量,却可能由于使用寿命不达标从而间接影响到刀片涂层质量。
The reactor temperature of CVD coating equipment is controlled by a heating cover. On the CVD equipment, comparing the blade coating test result on different temperature control parameters of heating cover and different technical designed heating cover, study the influence of the difference on the blade coating quality. Research shows that temperature PID parameters affect the quality of the coating blade products, temperature fluctuations too big lead to film thickness is not uniform; Although heating cover process design after qualified in temperature control may not directly influence the coating quality, but may be due to substandard service life and indirectly affect the blade coating quality.
出处
《福建冶金》
2017年第5期47-50,共4页
Fujian Metallurgy
关键词
CVD涂层
温度
成膜质量
制作工艺
温度PID
CVD coating
temperature
film quality
production process
temperature PID
