精密和超精密加工中粉尘微粒的影响与防止

Influence and Prevention of Dust in Precision Machining and Ultra-precision Machining

阐述了粉尘微粒在精密和超精密加工中对加工精度和表面质量的影响 ,及如何减少粉尘微粒的影响 ,以保证精密和超精密加工的加工精度和表面质量。并讨论了精密加工和超精密加工中洁净区域气流组织的形式。

The influences of dust on machining accuracy and surface roughness in precision machining and UItra-precision machining are described.By reducing the influences,the machining accuracy and surface roughness of precision machining and Ultra-precision machining can be assured.The air current modes in purification of air are also deseribed.