掩膜间隙和刻蚀温度对738模具钢侧蚀量的影响

Effects of Mask Gap and Etching Temperature on Etching Rate of Die Steel 738

采用喷淋蚀刻工艺对738模具钢进行微细蚀刻加工,研究了蚀刻加工中掩膜间隙和蚀刻温度对侧蚀量的影响。通过单因素方差分析对因素水平进行显著性检验,采用OriginPro 8.0拟合测蚀量与掩膜间隙、蚀刻温度关系的方程。结果表明,掩膜间隙和蚀刻温度对侧蚀量有显著性影响;在30℃蚀刻时,侧蚀量随掩膜间隙的增大先快速增大后减小;在150μm掩膜间隙下蚀刻,侧蚀量随蚀刻温度的增加而增加。

Micro-etching of die steel 738 was processed in spray etching.The effects of mask gap and etching temperature on undercut were studied.Using one-way analysis of variance process experimental data got the significance testing,the fitted equations showing the relationships of undercut with mask gap and etching temperature were also got in linear fitting.It is found that the mask gap and etching temperature have significant impact on undercut.The undercut first increases,and then decreases gradually with the rise in mask gap at 30 ℃.When the mask gap is 150μm,the undercut grows as temperature increases.