摘要
测定并分析了用PCVD法获得的TiN涂层内的残余应力、涂层的抗变形性以及涂层的耐磨性。实验结果表明,TiN涂层内有残余应应力存在,在一定的变形力作用下,涂层将发生脆性断裂,TiN涂层的耐磨性是45°淬火钢的24倍。TiN涂层这些特性为它的应用奠定了基础。
Residual stresses, deformation resistance and wear resistance of PCVD TiN coating are determined. The results show that residual compressive stresses exist in the coating. Brittle fracture will occur as the result of deformation force. The wear res-istance of TiN coating is 24 times as that of 45″quench steel. These properties of the cating have laid the foundations for its application.
出处
《表面技术》
EI
CAS
CSCD
1992年第3期120-123,共4页
Surface Technology
关键词
气相沉积
等离子体
氮化钛
涂层
TiN coating
PCVD
deformation resistance
residual stresses
wear resistance
