氢水平衡法制备二氧化钒薄膜及XPS能谱分析

Preparation of VO_2 Thin Films by H_2/H_2O Equilibrium Method and XPS Analysis

采用溶胶 -凝胶法 ,结合氢水平衡还原处理得到了二氧化钒薄膜 ,对薄膜的 XPS能谱分析及对反应体系的热力学分析表明 。

VO 2 thin films were prepared by the sol gel method followed by the H 2/H 2O equilibrium reduction treatment. The films were analyzed by the X ray photoelectron spectrometry (XPS) techniques. The XPS results and the thermodynamic analysis show that the H 2/H 2O equilibrium method is a practical way to prepare VO 2 thin films.