摘要
A precise micro location compliant stage with elastics supported system is employed for investigations. The general motion of stage supported by elastic structure is described. The analyses of forward displacement and inverse displacement of stage are formulated. The study of input output behavior of compliant mechanisms actually belongs to a stress strain field problem. By using finite element analysis, the compliance coefficients of the stage supported by ring are calculated. Finally, a case is investigated to exemplify these formulae.
A precise micro location compliant stage with elastics supported system is employed for investigations. The general motion of stage supported by elastic structure is described. The analyses of forward displacement and inverse displacement of stage are formulated. The study of input output behavior of compliant mechanisms actually belongs to a stress strain field problem. By using finite element analysis, the compliance coefficients of the stage supported by ring are calculated. Finally, a case is investigated to exemplify these formulae.
基金
ProjectsupportedbytheNationalNaturalScienceFoundationofChina ( 5 9875 0 2 3)andDoctorSubjectFoundationofEducationMinistryofChina ( 980 48711)
