摘要
To solve the problem on the microstructural characterization of metallic superlattices,taking the NiFe/Cu superlattices as example,we show that the sturctures of metallic superlattices can be characterized exactly by combining low-angle X-ray diffraction with high-angle X-ray diffraction.First,we determine exactly the total film thickness by a straightforward and precise method based on a modified Bragg law from the subsidiary maxima around the low-angle X-ray diffraction peak.Then.by combining with the simulation of high-angle X-ray diffraction.we obtain the sturctural parameters such as the superlattice period,the sublayer and buffer thickness,This characterization procedure is also applicable to other types of metallic superlattices.
