基于电路模拟的热阴极电离真空计电参数校准装置及方法

Calibration Device and Method of Electrical Parameters of a Hot Cathode Ionization Vacuum Gauge Based on the Electrical Circuit Analogy Method

传统热阴极电离真空计的电参数校准中,必须将热阴极电离真空规与热阴极电离真空计连接并为其提供高真空环境,且校准周期普遍较长。针对该问题,提出一种等效模拟热阴极电离真空规的方法,研制了新型热阴极电离真空计电参数校准装置。该装置可单独对热阴极电离真空计的阴极电压、栅极电压、发射电流等电参数进行自动化校准,适用于无配套热阴极电离真空规情况下的校准和现场校准。解决了传统热阴极电离真空计电参数校准装置存在的问题,并为使用其他热阴极电离源真空仪器的调试提供了新思路。

In the traditional electrical parameters calibration method of hot cathode ionization vacuum gauge controller,the vacuum gauges and the controllers must be connected and provided with a high vacuum environment,and the calibration cycle is long. To solve these problems,an equivalent simulation method of hot cathode ionization vacuum gauge controller is proposed,and a new calibration device for controller of hot cathode ionization vacuum gauge electrical parameters is developed. The device is used to calibrate the electrical parameters of the hot cathode ionization vacuum gauge controller,such as cathode voltage,grid voltage and emission current without vacuum gauge. The device is suitable for calibration with no matching vacuum gauge and on-site calibration. The problems of traditional electrical parameters calibration device for hot cathode ionization vacuum gauge controller are solved,and the device provides a new idea for developing other vacuum instruments using hot cathode ionization sources.