一种海洋MEMS电导率传感器结构优化设计

A Structural Optimized Design of Marine MEMS Conductivity Sensor

为提高一种海洋MEMS电导率传感器的测量性能,基于电场基本理论分析了影响传感器测量性能的主要因素,并对传感器结构进行优化设计。采用COMSOL软件分别构建和仿真了优化前后传感器测量模型,得出海水电导率在5 mS/cm^70 mS/cm,激励频率在10 kHz^100 kHz范围内,传感器结构优化后比优化前对应的海水测量阻值范围提高了4.39倍,。优化后的传感器结构准确度提升至±1.18%,灵敏度提升至15.6 cm^-1。且优化前传感器结构准确度与灵敏度的仿真值与相关文献同类型结构传感器实际数据相近,因此本文优化设计贴近实际,参考价值较高。

In order to improve the measurement performance of a marine MEMS conductivity sensor,the main factors affecting the sensor’s measurement performance are analyzed based on the basic theory of electric field,and the sensor structure is also optimized.The sensor’s measurement model before and after optimization are constructed and simulated by COMSOL software.The result shows that when seawater’s conductivity is in 5 mS/cm^70 mS/cm and excitation frequency is in 10 kHz^100 kHz,the resistance range of seawater measurement after optimization is 4.39 times higher than that before optimization.The structure accuracy and sensitivity of the optimized sensor are increased to±1.17%and 15.6 cm^-1 respectively.And the simulation results of the accuracy and sensitivity of the sensor structure before optimization are close to the actual data of the same type of sensor in relevant literature.Therefore,the optimization design in this paper is close to the reality and has a high reference value.