集成式表面镀膜微型温度/热流传感器的初步研制与测试

Preliminary Development and Test of Integrated Surface Coating Micro Temperature and Heat Flow Thin-film Sensors

基于高速飞行器表面大面积热环境精确测量和转捩面测量的需要,本文专门设计了集成式点测量薄膜电阻温度计,在50mm×50mm的玻璃基底上实现了25个测量单元,对制造的电阻温度进行了相关的测试工作,并对测得值的不确定度进行了分析。研究表明:不同方案制造的铂电阻温度计的电阻值均在150Ω以上,热点系数的平均线性斜率为0. 261,且热电阻的抗冲刷性能良好。本文设计的传感器为下一步开展大面积精细化热环境测量和转捩阵面分析奠定了测试基础。

Based on the precise measurement of the large-area thermal environment on the surface of the hypersonic vehicle and the measurement of the transitional surface,this paper specially designed and manufactured an integrated point-measuring thin-film resistance thermometer,which realized 25 measuring units on a 50 mm ×50 mm glass substrate. Relevant verification and test work was carried out on the manufactured resistance thermometer,Analysis of uncertainty of Measurement results. The research shows that the resistance values of platinum resistance thermometers manufactured by different schemes are all above 150Ω,the average linear slope of thermoelectric coefficients is 0. 261,and the anti-scour performance of thermal resistors is good. The sensor design and calibration work involved in this paper laid the test foundation for the next step of large-scale refined thermal environment measurement and transitional array analysis.