摘要
本文介绍了一种金相显微镜图像测量示值误差的校准方法。按照此方法对某金相显微镜图像测量的示值误差进行校准。通过校准结果分析,证明了该校准方法对测量点选择的有效性。通过对示值误差的校准结果及符合性判断的分析,确认该金相显微镜图像测量的示值误差满足MPEV为2%的要求,因此可利用此金相显微镜对人工缺陷这类微小尺寸样品进行图像测量。
A calibration method for the indication error of metallographic microscope image measurement is introduced in this paper. According to this method,the indication error of a metallographic microscope image measurement is calibrated. Through the analysis of calibration results,the validity of the calibration method for the selection of measuring points is proved. Based on the analysis of the measurement results and conformity judgment of the indication error,it is confirmed that the indication error of the metallographic microscope image measurement meets the requirement of 2% MPEV. Therefore,this metallographic microscope can be used to measure the micro-size samples such as artificial defects.
作者
樊萌
张重远
Fan Meng;Zhang Zhongyuan
出处
《计量与测试技术》
2019年第9期114-116,118,共4页
Metrology & Measurement Technique
关键词
金相显微镜
图像测量
示值误差
校准方法
人工缺陷
metallographic microscope
image measurement
indication error
calibration method
artificial defect