塑封器件分层检测不合格原因探讨

Unqualified Analysis about Delamination Testing of the Plastic Encapsulated Microcircuit

在塑封半导体器件内部裂纹、空洞和分层缺陷的检测中,同样的样品不同单位、不同试验人员总会出现一些器件检测结果不一致的情况。为研究导致检测结果不一致的原因,通过对超声扫描检测技术原理和适用判据标准的阐述,对不同设备的比对验证以及对塑封器件材料的吸湿影响试验和分析,探讨了塑封器件分层检测不合格和不一致的原因,为同行业者提供借鉴和参考。

Acoustic scanning microscope is an important equipment for plastic encapsulated microcircuit(PEM)on testing the internal cracks,voids and delaminations.In practical work,the testing results will be different,because of the marginal influence such as the material absorption humidity,equipment set status or different defects criterion etc.The principle of the acoustic scanning technology,proper standard and defects criterion are stated.The influence from the different equipment status and material absorption humidity are analyzed.The unqualified and inconsistent reasons in the testing of the PEM,so as to get the more reliable and more precise result on the judging the delamination defects of the PEM are summarized for your reference.