环境温度对Ti-Mo-N薄膜摩擦磨损性能的影响

Influence of environmental temperature on the friction and wear properties of Ti-Mo-N films

采用多靶共聚焦射频磁控溅射仪制备了Mo含量为46.0%的Ti-Mo-N薄膜,研究了不同环境温度对薄膜摩擦磨损性能的影响.结果表明,Ti-Mo-N薄膜平均摩擦系数(μ)及磨损率(W)受环境温度影响很大,根据其变化趋势,可将环境温度分为3个区间(A,B,C),对应环境温度范围分别为25~200℃、200~300℃、300~600℃.随环境温度升高,区间A内μ逐渐升高,W略有降低;区间B内μ及W基本保持稳定;区间C内μ逐渐降低,W逐渐升高.分析认为磨痕中具有自润滑作用的氧化相的量是导致薄膜μ及W出现上述变化趋势的主要原因.

The Ti-Mo-N film at 46.0 at.%was deposited using the multi-target co-focusing RF magnetron sputtering system and the influence of different environmental temperatures on the friction and wear properties was investigated.The results showed that both the average friction coefficient(μ)and wear rate(WR)of the film were influenced by the environmental temperature significantly.The environmental temperature could be divided into three ranges(A-C),which were represented by 25-200℃,200-300℃and 300-600℃,respectively.As the environment temperature increased gradually,μin the range A increased gradually,while WR in the range A decreased slightly;bothμand WR remained stable in the range B;andμin the range C decreased gradually,while WR increased gradually in the range C.The relative mass fraction of layered lubricious oxides with low shear strength mainly induced the changes ofμand WR at different environment temperatures.