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基于介电泳力的单根纳米线组装仿真与实验研究

Simulation and Experimental Study on Assembly of Single Nanowire Based on Dielectrophoresis
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摘要 为将单根纳米线成功组装至微电极两端,在介电泳力的基础上附加考虑粘滞阻力及布朗力的影响,建立了单根纳米线受力及运动模型,通过数值仿真得到纳米线在三维空间中的运行轨迹,并基于可控介电泳工作区模型(DWS-DEP)获得了可实现准确跨接的初始点分布区。为选择合适的电极组装单根纳米线,对三种不同尖端弧度的电极稳态区进行仿真,结果显示圆弧状电极更易实现一维纳米结构的跨接组装。利用所设计的Ti/Au电极进行纳米线介电泳组装实验,得到了与仿真相一致的结果。 In order to assemble a single nanowire to both ends of the microelectrodes successfully,besides dielectrophoretic force,the influence of viscous drag and Brownian force was taken into account to establish the force and motion model of a single nanowire.The trajectory of the nanowire in three-dimensional space was obtained by numerical simulation,and the initial point distribution area which can realize accurate crossing was obtained based on a controllable dielectrophoretic working space model(DWS-DEP).In order to select a suitable electrode shape to assemble asingle nanowire,quasi-stable region of three kinds of electrodes with different tip radians were simulated.The results show that the circular electrodes are easier to realize the cross-assembly of one-dimensional nanostructures.The designed Ti/Au electrode was used to assemble a single nanowire by dielectrophoresis,and the experimental results were in good agreement with the simulation results.
作者 黄蓉 刘伟景 孙宁 叶子 匡旭良 谷洋 黄宁 HUANG Rong;LIU Weijing;SUN Ning;YE Zi;KUANG Xuliang;GU Yang;HUANG Ning(College of Electronical and Information Engin.,Shanghai University of Electric Power,Shanghai 200090,CHN)
出处 《半导体光电》 CAS 北大核心 2019年第5期649-654,660,共7页 Semiconductor Optoelectronics
基金 国家自然科学基金项目(11404207,61604002,11647023) 上海自然科学基金项目(17ZR1411500)
关键词 纳米线 介电泳力 DWS-DEP模型 稳态区 nanowire dielectrophoresis DWS-DEP model quasi-stable region
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