三维微结构显微干涉检测方法

Detection Method of 3D Micro-structure Based on Microscopic Interference

三维微结构在光陷阱、隐身与光场调控、超高压密封、人工生物材料等领域具有重要的应用价值。三维微结构的加工制造方法,包括激光直写、光刻、电子与化学蚀刻等先进制造方法发展迅速,其检测仪器有扫描电镜(SEM)、原子力显微镜(AFM)、激光共焦显微镜、低相干干涉显微镜,但这些检测仪器一直受到西方发达国家垄断。阐述国内在低相干干涉显微测量方法方面的研究进展,包括干涉显微镜的光学设计方法、装校流程、宽谱低相干干涉图处理与微结构形貌复原方法,并给出了不确定度评定结果。结果表明:仪器三维形貌合成不确定度为0.9 nm,最大微结构轴向分辨率为0.13 nm。

The 3D micro-structures have important application value in the fields of optical trap,stealth and light field regulation,ultra-high pressure sealing and artificial biological materials.Advanced manufacturing methods for 3D micro-structures,including laser direct writing,photolithography,electronic and chemical etching,are rapidly developing.The detectors of Scanning Electron Microscopy(SEM),Atomic Force Microscopy(AFM),laser confocal microscopy,and low-coherence interference microscope are used,but these instruments are monopolized by foreign countries.This paper describes the research progress in low-coherence interference microscopy in China,including the optical design method of interference microscope,the assembly process,the wide-spectrum low-coherence interferogram processing and the micro-structure restoration method,and the evaluation of the uncertainty is given.The results show that the combined uncertainty of 3D morphology of the instrument is 0.9 nm and the maximum micro-structure axial resolution is 0.13 nm.