CVD样品台旋转对沉积金刚石涂层的影响

Effect of Sample Rotation on Chemical Vapor Deposition Diamond Coatings

以CH 3 COCH 3和H 2为反应气源,利用热丝化学气相沉积(HFCVD)方法,通过改变样品台的旋转频率在YG6硬质合金(WC-6wt%Co)基体上沉积金刚石涂层。利用X射线衍射分析YG6硬质合金表面沉积金刚石涂层物相,通过扫描电子显微镜和压痕试验机分析金刚石涂层的表面形貌、沉积厚度和膜基结合性能,考察了样品台旋转频率对沉积金刚石涂层结构与性能的影响,以确定最佳的样品台旋转频率。结果表明,在固定沉积工艺参数条件下,当样品台的旋转频率为2次/h时,在YG6硬质合金基体上沉积的金刚石涂层具有较优的晶粒和更均匀致密的聚晶结构以及更高的膜-基结合力。

Hot filament chemical vapor deposition(HFCVD)diamond coatings were deposited on YG6 cemented carbide(WC-6wt%Co)matrix using CH 3 COCH 3 and H 2 as reaction gas sources by means of changing the rotation frequency of the sample table.The surface morphology,thickness and bonding properties of diamond coatings were analyzed by scanning electron microscope,X-ray diffraction and indentation test,and the effect of the rotation frequency of the sample table on the structure and properties of the deposited diamond coating was investigated in order to determine the optimal rotation frequency of the sample table.The results show that under the condition of fixed deposition process parameters,when the rotation frequency of the sample table is 2 times per hour,the diamond coating deposited on the YG6 cemented carbide substrate has better grain size and more uniform dense polycrystalline diamond structure and higher interfacial bonding force of diamond coating to the substrate.