多弧离子镀TiCrSiCN硬质薄膜的微观结构与摩擦学性能

Microstructure and tribological properties of multi-arc ion plated TiCrSiCN hard coatings

采用工业型多弧离子镀设备在4Cr5MoSiV1工业钢表面沉积TiCrSiCN硬质薄膜.借助扫描电子显微镜(SEM)、X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)、显微硬度计、划痕仪和摩擦磨损仪分析了TiCrSiCN薄膜的微观结构、力学性能和摩擦学性能.结果表明,TiCrSiCN薄膜为纳米晶和非晶的复合结构,其中的Ti(CN)和CrN纳米晶可显著提高硬度和耐磨性,而非晶相Si3N4与C起到减摩作用.高Cr和C含量的薄膜硬度高,与基材的结合力强,干滑动摩擦因数、干滑动磨损率和微磨料磨损率都明显降低,耐磨减摩效果好.

TiCrSiCN hard coatings were deposited on 4Cr5MoSiV1 steel by using an industrial multi-arc ion plating device.The microstructure as well as mechanical and tribological properties were studied by using scanning electron microscope(SEM),X-ray diffractometer(XRD),X-ray photoelectron spectroscope(XPS),microhardness tester,scratch tester,and tribometer.The TiCrSiCN coatings have a composite structure comprising nanocrystals and amorphous phases,where Ti(CN)solid solution and CrN particles exhibit high hardness and wear resistance,while amorphous Si3N4 and C phases play an important role of antiattrition.The TiCrSiCN coating with high Cr and C contents possess a good combination of low dry sliding friction coefficient and wear rate as well as micro-abrasive wear,showing good wear resistance and antiattrition property.