微结构密集阵列精密加工与在位检测技术的研究

Research on In-position Detection Technology and Precision Machining of Micro-structured Dense Arrays

针对微结构密集阵列精密加工与在位检测技术进行了研究。研究内容主要包括微结构密集阵列精密加工与在位检测流程、微结构密集阵列精密加工工艺及改进,探讨了Y轴调节平台的调节方法,分析了原有调节方法的不足,并提出了相应的优化方法,即自动磁吸模芯、自动调节模芯水平斜度功能的平台。为了提升模芯水平斜度调节精度对模芯平面度进行检测,对不符合要求的需要通过精密磨削加工进行提升。重点介绍了对刀过程中宏动、微动调节不合适出现的各种对刀不当的问题,并提出了更加简便快捷的对刀工艺。

The precision machining and in-situ detection technology of microstructure dense array are studied.The research contents mainly include the precision machining and in-situ detection flow of microstructure dense array,the precision machining technology and improvement of microstructure dense array,discusses the adjustment method of Y axis adjustment platform,analyzes the shortcomings of the original adjustment method,and puts forward the corresponding optimization methods,that is,the automatic magnetic suction core and the platform for automatically adjusting the horizontal slope of the die core.In order to improve the horizontal slope adjustment accuracy of the die core to detect the flatness of the die core,the needs that do not meet the requirements are improved by precision grinding.This paper mainly introduces the macro movement and fretting adjustment in the process of knife alignment.All kinds of improper knife alignment problems are suitable,and a more simple and fast knife alignment process is put forward.