热应力对FeCo薄膜磁晶各向异性能的影响

Effect of thermal stress on the magnetocrystalline anisotropy energy of FeCo thin films

采用磁控溅射的方法在300℃下,分别在热膨胀系数相差较大的玻璃和NaCl单晶基片上沉积了Cr90Ru10(002)/Rh(002)/Fe40Co60(002)/Rh多层膜,以研究热应力对FeCo薄膜的磁晶各向异性能的影响。对样品进行X射线衍射(XRD)分析,研究了薄膜的外延生长关系。通过计算样品磁滞回线的面积得到了样品的磁晶各向异性能。实验结果表明,沉积在NaCl基片上的FeCo薄膜的厚度在1 nm、2 nm时磁晶各向异性能的值高达1.2×10^7 erg/cm^3,较大热应力的引入对于提高磁晶各向异性能有显著的效果。

In this paper,Cr90 Ru10(002)/Rh(002)/Fe40 Co60(002)/Rh multilayers were deposited on glass and NaCl single crystal substrates with different thermal expansion coefficients by magnetron sputtering at 300℃,respectively,in order to study the effect of thermal stress on the magnetocrystalline anisotropy energy of FeCo thin films.XRD measurements were carried out on the samples,and the epitaxy growth relationship of the films was studied.The hysteresis loop was obtained by VSM test,and the magnetocrystalline anisotropy energy of the sample was obtained by calculating the area of the hysteresis loop.The experimental results show that the magnetocrystalline anisotropy energy of FeCo films deposited on NaCl substrates is as high as 1.2×10^7 erg/cc when the thickness of FeCo films is 1 and 2 nm.The introduction of large thermal stress has a significant effect on improving the magnetocrystalline anisotropy.