摘要
为了更好地研究低温等离子体,设计一款高重频、高效率和良好稳定性的等离子体脉冲激励源至关重要。分析了实现零电压开关的原理,基于移项控制ZVS(Zero Voltage Switching)全桥变换器设计了等离子体脉冲电源主电路,它以IGBT作为开关管,由UC3842芯片对其驱动波形进行移项控制;通过Multisim建立了仿真模型,在验证主回路实现了零电压开关的情况下,变压器副边在1 kΩ的负载上输出了频率40 kHz、幅值5.2 kV的窄脉冲方波。
In order to better study low-temperature plasma,it is very important to design a plasma pulse excitation source with high repetition frequency,high efficiency and good stability.The principle of zero-voltage switching is analyzed.The main circuit of plasma pulse power supply is designed based on the shift control ZVS(Zero Voltage Switching)full-bridge converter.The circuit uses IGBT as the switching tube,and the UC3842 chip controls the driving waveform.The simulation model is established by Multisim.In the case of verifying that the main loop realizes zero voltage switching,the secondary side of the transformer outputs a narrow pulse square wave with a frequency of 40 kHz and a amplitude of 5.2 kV on a load of 1 kΩ.
作者
贾垭楠
李占贤
刘国莎
JIA Ya-nan;LI Zhan-xian;LIU Guo-sha(School of Mechanical Engineering,North China University of Science and Technology,Tangshan 063210,China;Hebei Robot Industrial Technology Research Institute,Tangshan 063210,China)
出处
《机械工程与自动化》
2019年第6期182-184,共3页
Mechanical Engineering & Automation
