光谱椭偏系统光源和光谱仪偏振相关系数测量

Measurement of polarization correlation coefficients of light source and spectrometer in spectroscopic ellipsometry

光谱椭偏测量技术已广泛应用于材料科学、微电子、物理化学和生物医学等领域。在光谱椭偏测量系统中,由于起偏器和检偏器存在漏光等瑕疵,光源子系统的偏振度和光谱仪子系统的偏振敏感度会影响光谱椭偏系统的测量精度。针对这一问题,本文建立了光谱椭偏测量系统的偏振相关系数的修正模型;并提出了一种同时测量光源子系统和光谱仪子系统偏振相关系数的方法。利用现有实验室内的宽带光源系统和宽带光谱仪验证了这种测量方法的可行性。

Spectroscopic ellipsometry has been widely used in materials science, microelectronics, physical chemistry and biomedicine. In the spectroscopic ellipsometry system, the degree of polarization of the light source subsystem and the polarization sensitivity of the spectrometer subsystem will affect the measurement accuracy of the spectroscopic ellipsometry considering the leakage of polarizer and analyzer. To remove this systematic error, we included the degree of polarization of light from source and the polarization sensitivity of the spectroscopic ellipsometry in our calibration model;a method for measuring the polarization state of light source subsystem and polarization sensitivity of a spectrometer subsystem is proposed. To verify the method, we present the measurement setup and results for a commercial broadband light source and broadband spectrometer.