基于牺牲层工艺的微流控亚微米粒子计数器研究

Microfluidic submicron particle counter based on sacrificial layer process

设计了一种基于微机电系统表面微加工工艺的亚微米粒子计数器微流控芯片。该芯片具有可大规模生产、价格低廉的优势,相比于纳米粒子跟踪分析技术和动态光散射技术,具有体积小、便于集成和在线检测的优点。芯片的检测区域尺寸为高700 nm、宽1μm,可以检测到粒径300 nm的聚苯乙烯微球,具有良好的信噪比。该芯片可以提供一种新的价格低廉的亚微米颗粒物在线检测方法,且采用微机电加工技术,和半导体加工工艺兼容,具有形成芯片实验室的潜力。

A microfluidic chip for submicron particle counting was proposed based on the surface micromachining process of MEMS,in which the Coulter Counter principle was employed for electrical sensing of submicron particles passing through the counter channel.Due to the fabrication process of the MEMS technology,the proposed chip has the advantages of mass-production and low price.Compared with the nanoparticle tracking analysis technology and dynamic light scattering technology,the chip has the advantages of miniaturization,easy integration and online detection.The detection area of the chip was 700 nm in height and 1μm in width.Polystyrene microspheres with a particle size of 300 nm were detectable with a good signal-to-noise ratio.The fabrication of chip by the MEMS processing is compatible with semiconductor processing technology,and has the potential to be integrated as a lab-on-a-chip system,which provides a novel and low-cost method for online submicron particle detection.