高精度光学MEMS加速度计研究现状及发展

Research Status and Development of High Precision MOEMS Accelerometers

采用了光学检测技术和MEMS技术的微加速度计,不仅具有MEMS加速度计体积小、功耗低、可靠性高等优点,同时具备光学测量的抗电磁干扰和高精度的优势,是未来高精度加速度计的发展方向。分析了微光机电(MOEMS)加速度计的原理和结构特点,总结了MOEMS加速度计的主流分类和发展趋势。具体分析了光纤布拉格光栅式,法布里-珀罗干涉式、光子晶体纳米腔式以及光栅干涉衍射式加速度计的原理及目前达到的精度指标。对这几种微光机电加速度计的技术特点和主要指标进行了比较,并初步探讨了用于惯性领域中的MOEMS加速度计的发展方向和应用前景。

Combining optical detection and MEMS technology,micro-accelerometer not only has the advantages of small size,low power consumption and high reliability of MEMS accelerometer,but also has the advantages of anti-electromagnetic interference and high precision of optical measurement,which is the development direction of high-precision accelerometer in the future.In this paper,the principle and structure characteristics of MOEMS accelerometers are analyzed,and the main classification and development trend of MOEMS accelerometers are summarized.The principle and precision index of fiber Bragg grating type,fabry-perot interference type,photonic crystal nano-cavity type and grating interference diffraction type accelerometer are analyzed in detail.The technical characteristics and main indexes of these micro-opto-electromechanical accelerometers are compared,and the development direction and application prospect of MOEMS accelerometers used in inertial field are preliminarily discussed.