压电加速度传感器磁灵敏度的多维测试方法的研究

Multidimensional Test Method of Magnetic Sensitivity Based on Piezoelectric Acceleration Sensor

目前压电加速计的磁灵敏度的测试方法采用ISO/5347-19-1993《振动与冲击传感器的校准方法磁灵敏度测试》,这种方法不能去除传感器自转产生固有振动信号的干扰,难以保证测量结果的准确性。本文分析了压电加速度传感器磁灵敏度产生原理,针对当前国际标准存在的问题,提出一种三维的压电加速度传感器磁灵敏度测试方法。利用该方法对压电加速度传感在不同磁场强度下和固定磁场下多个维度的信号输出进行测量。测量数据显示传感器磁灵敏度随磁场强度增大呈非线性增大规律,且传感器的磁灵敏度具有空间矢量。结果表明多维测试方法能够有效测量传感器磁灵敏的空间矢量,克服了传统测量方法信噪比低的缺点,减小了测量误差。

Currently,< ISO/5347-19-1993 > is widely used in the magnetic sensitivity testing of piezoelectric acceleration sensor. However,this testing method is incapable of eliminating the interference caused by sensor rotation and difficult to ensure the accuracy for measuring result. This essay analyzed the generating principle for the magnetic sensitivity of piezoelectric acceleration sensor,then indicated the problems existing in current international standard,finally presented a three-dimensional magnetic sensitivity test method. Using this method can test output of piezoelectric acceleration sensor under different magnetic field intensity and fixed magnetic field. Measurement data showed that sensor’s magnetic sensitivity increases with increasing magnetic field intensity and be nonlinear,with space vector. Multidimensional test method can effectively measure space vector for sensor,overcome the shortcomings of traditional measurement(low signal-to-noise ratio),and reduce measuring error.