圆柱型永磁体磁流变抛光头设计及其参数优化

Design of cylindrical permanent magnet magnetorheological polishing head and its parameter optimization

针对传统加工技术存在表面损伤、加工效率低的问题,将极具前景的面接触式超精密磁流变抛光技术应用到3C制造业中。对圆柱型永磁体磁流变抛光头在加工过程中的抛光垫的形貌进行了研究分析,发现圆柱型永磁体磁流变抛光头在加工过程中存在一种"环状效应",利用"环状效应"对圆柱型永磁体磁流变抛光头进行了结构设计,并对其进行了设计理念分析;对圆柱型永磁体抛光头在6061的铝合金工件上进行了单因素抛光实验,通过实验获得了最优参数。研究结果表明:该圆柱型永磁体磁流变抛光头能够实现环状加工区域的高效光滑平坦化加工,工件表面粗糙度达到52 nm,材料去除率达9.1μm/min,大大提高了磁流变抛光的效率,为面形精度在微米级的超光滑平面的制造提供了一种高效的加工方法。

Aiming at the problems of surface damage and low processing efficiency in traditional processing technology, the extremely promising surface contact ultra-precision magnetorheological polishing technology was applied to 3 C manufacturing industry. The morphology of the polishing pad in the process of cylindrical permanent magnet magnetorheological polishing head was studied and analyzed. It was found that the cylindrical permanent magnet magnetorheological polishing head has a "ring effect" during processing. The "ring effect" was structurally designed for the cylindrical permanent magnet magnetorheological polishing head and its design concept was analyzed. The single-factor polishing experiment was carried out on the 6061 Aluminum alloy workpiece by the cylindrical permanent magnet polishing head, and the optimal parameters were obtained by single factor experiment. The results indicate that the cylindrical permanent magnet magnetorheological polishing head can realize high-efficiency smooth flat processing of the annular processing area, the surface roughness of the workpiece reaches 52 nm, and the material removal rate reaches 9.1 μm/min, which greatly improves the magnetorheological polishing. The efficiency provides an high-efficient processing method for the fabrication of ultra-smooth surfaces with micron-level accuracy.