三腔滑片式真空泵的几何理论与性能研究

Novel Type of Sliding-Vane Vacuum Pump with Tipple-Chamber:A Theoretical and Experimental Study

滑片式真空泵的排气量偏小、抽气速率低限制了其应用场合。本文利用正弦螺旋线提出了一种新型的三腔滑片式真空泵,并对其工作性能进行了理论与试验研究等几何尺寸下,三腔滑片式真空泵相比双腔简谐结构形式排气量可提高37%;三腔滑片式真空泵的抽速可达1 L/s,极限压强能够达到13 kPa。三腔滑片式真空泵的抽速更快,缩短了滑片式真空泵达到指定压强的抽气时间,很好地验证了理论模型。对于开发新产品具有重要的参考价值。

A novel type of sliding vane vacuum pump(SVVP),with triple-chamber and with a cylinder profile of sinusoidal spiral,was developed.The kinematics and dynamics of the SVVP with double and/or triple chambers were empirically approximated,mathematically modeled and theoretically analyzed.The performance of the prototyped SVVP with triple-chamber was experimentally evaluated with the lab-built test platform.The results show that the triple-chamber SVVP significantly outperforms the conventional double-chamber SVVP with a harmonic cylinder profile.To be specific,in the same geometrical dimensions,the pumping speed of the newly-developed triple-chamber SVVP was 37%higher than that of the double-chamber SVVP,reaching to 1 L/s and the lowest pressure was found to be 13 kPa.