探测器级单晶金刚石材料的生长

Growth of Detector Grade Single Crystal Diamond

采用高质量高温高压单晶金刚石衬底,通过等离子体环境净化的方法获得高纯、低缺陷密度金刚石材料,有望应用于医疗、核、宇宙射线等辐射探测器。采用微波化学气相沉积方法成功外延生长出了8 mm×8 mm的高质量单晶金刚石材料。晶体内无明显的应力集中区,X射线摇摆曲线(004)峰半高宽0. 008°,PL光谱中未见与氮相关杂质,基于电子顺磁共振测试孤氮杂质含量为23ppb。

High purity and low defect density diamond materials were obtained by plasma environment purification on high quality high pressure high temperature(HPHT)single crystal diamond substrates,which are expected to be applied in medical,nuclear and cosmic ray radiation detectors.8 mm×8 mm high quality single crystal diamond materials were successfully grown by microwave chemical vapor deposition.There was no obvious stress concentration area in the crystals.FWHM of(004)peak in X-ray rocking curve was 0.008°,and no nitrogen-related impurities were found in PL spectrum.Based on spectra tested by electron paramagnetic resonance(EPR),the content of nitrogen impurities was 23ppb.