摘要
The matrix assembly cluster source(MACS)represents a bridge between conventional instruments for cluster beam deposition(CBD)and thelevel of industrial production.The method is based on Ar^+ion sputtering of a pre-condensed Ar-M matrix(where M,is typically a metal such asAg).Each Ar^+ion produces a collision cascade and thus the formation of metal clusters is in the matrix,which are then sputtered out.Here wepresent an experimental and computational investigation of the cluster emission process,specifically its dependence on the Ar^+ion angle of in cidence and the cluster emission angle.We find the in cide nee angle strongly in flue nces the emerging cluster flux,which is assigned to thespatial location of the deposited primary ion energy relative to the cluster into the matrix.We also found an approximately constant anglebetween the incident ion beam and the peak in the emitted cluster distribution,with value between 99°and 109°.
