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316LN异型真空盒超高真空表面处理工艺的研究

Study on the Technology of Ultrahigh Vacuum Surface Treatment in 316LN Special-Shaped Vacuum Box
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摘要 第三代同步辐射光源在不同位置需要设计不同形状的真空腔体保证电子束在超高真空(<1.3×10^-8Pa)环境下运行。其中异型真空腔体作为第三代同步辐射装置的关键部件之一其制造过程中非常关键问题就是材料的表面处理。然而,针对316LN异型真空盒超高真空的表面处理工艺国内外还没有公开的发表过,对于316LN异型真空盒超高真空的表面处理工艺的研究工作也鲜有报道。因此,本文针对316LN异型真空盒超高真空表面处理工艺提出合理的工艺方案,针对316LN异型真空盒的表面处理工艺设计并组建一套完整的四极质谱残余气体检测分析系统,为316LN异型真空盒超高真空表明处理的研究提供理论依据。 The third-generation synchrotron requires to design a vacuum box with different shapes at different locations to ensure that the electron beam operates in an ultrahigh vacuum(<1.3 E^-8 Pa)environment.As one of the key parts of the third-generation synchrotron device,the surface treatment of the material is the key problem in the manufacturing process.However,the surface treatment technology for 316 LN special-shaped vacuum box of ultrahigh vacuum has not been published at home and abroad,and the research on the surface treatment technology of 316 LN special-shaped vacuum box of ultrahigh vacuum has rarely been reported.Therefore,this paper puts forward a reasonable process plan for 316 LN special-shaped vacuum box of ultrahigh vacuum surface treatment process,and designs and sets up a complete set of four-pole mass spectrometry residual gas detection and analysis system for 316 LN special-shaped vacuum box of ultrahigh vacuum surface treatment process.It provides a theoretical basis for the study of the treatment of 316 LN type vacuum box with ultra-high vacuum indication.
作者 邢银龙 吴杰峰 刘志宏 李波 周能涛 XING Yin-long;WU Jie-feng;LIU Zhi-hong;BO Li;ZHOU Neng-tao(Institute of Plasma Physics Chinese Academy of Sciences,Hefei 230031,China;Institute of Plasma Physics Chinese Academy of Sciences,Hefei 230036,China)
出处 《真空》 CAS 2019年第6期27-29,共3页 Vacuum
基金 新型高密度等离子体发生源研究与实验(11305217)
关键词 异型真空盒 超高真空 表面处理 工艺 special-shaped vacuum box ultra high vacuum surface treatment technological
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