纳米真空互联大装置（Nano-X）及其应用进展

Introduction of Nano-X and it’s Application Progress

进入纳米时代后,纳米材料与纳米器件的性能不只取决于块体材料的性质,而更主要是由材料的表、界面性质来决定。为了避免由于表面污染而造成的改变与损伤,薄膜材料通常需要放置于超高真空环境中。本文介绍了纳米真空互联大装置的必要性、功能,以及支持项目和取得的重要进展。

After entering the nano era,the properties of nano-materials and nano-devices are not only determined by the properties of bulk materials,but also by the properties of material′s surface and interface.In order to avoid ucontrollable changes and damages caused by surface contaminations,the thin film materials and nano-scale devices must be processed in ultra-high vacuum environment.This paper introduces the necessity,functions and applications of Nano-X.