超精密加工中的修整技术研究

Research on Dressing Technology in Ultra-precision Machining

超精密加工精度可以精确到亚微米,加工表面粗糙度可达纳米级。对于传统的加工精度较低、加工质量不高的问题,探讨新型超精密磨削加工中的修整技术--半刚性磨具修整磨削,对其磨削修整装置的工作原理、关键技术进行深入研究。

Ultra-precision machining accuracy can be accurate to submicron,and surface roughness can reach nanometer level.For the problems of low precision and low quality of traditional grinding,this paper discusses a new dressing technology in ultra-precision grinding,semi-rigid grinding tool dressing and grinding,and deeply studies the working principle and key technology of its grinding and dressing device.