宽谱增透双层TiO2-SiO2/SiO2薄膜的制备与性能

Preparation and Performance Study of Double Layer TiO2-SiO2/SiO2 Anti-reflection Films in Wide Optical Wavelength

采用溶胶-凝胶法制备了双层TiO2-SiO2/SiO2薄膜,调控了底层薄膜的折射率及双层薄膜不同的厚度匹配,研究了在不同厚度匹配下薄膜的光学性能。通过场发射扫描电子显微镜、椭偏仪、紫外-可见-红外分光光度计研究了薄膜的微观结构、厚度、折射率和光学透过率。研究表明:以TiO2与SiO2混合溶胶镀膜获得了折射率可调(1.5~2.0)的薄膜,在TiO2-SiO2层与SiO2层的厚度分别约为160 nm、90 nm时获得了光学性能较优的薄膜,薄膜在光学宽谱380~1100 nm范围内表现出明显的增透效果,可见光最高透过率可达97.5%,宽谱平均透过率为93.9%。

Double layer TiO2-SiO2/SiO2 composite anti-reflective thin films were prepared by sol-gel method.The refractive index and thickness of the layer was regulated,then optical performance of the films prepared were researched.The film morphology,film thickness,refractive index and transmittance of the films were investigated by field emission scanning electron microscopy(FESEM),ellipsometer and ultraviolet-visible-infrared spectrophotometer,respectively.The results show that the refractive index of TiO2-SiO2 thin film prepared is about 1.5—2.0.Better optical performance of the double layer is obtained when the thickness of TiO2-SiO2 and SiO2 are 160 nm and 90 nm,The films show significant transmittance improvement in wide light wavelength of 380—1100 nm,the maximum transmittance in visible light can reach to 97.5%,and the average transmittance is 93.9%.