超声振动辅助微细电化学放电加工系统研究

Investigation on ultrasonic vibration assisted micro electrochemical discharge machining tool

面向玻璃、工程陶瓷等非导电硬脆材料进行微细精密加工需求,针对传统微细电化学放电加工技术存在的表面质量差、几何误差大等问题,研制了超声振动辅助微细电化学放电加工系统。首先,分析了超声振动辅助电化学放电加工原理并设计搭建了加工硬件系统。然后,基于LabWindows/CVI开发环境开发了适应于超声振动辅助电化学放电加工特点的加工控制软件系统。最后,使用此系统进行了微细钻削加工对照实验,成功在厚度为300μm的玻璃工件上加工出了入口直径为133.2μm的微孔,与无超声相比具有更小的入口直径,同时入口处微裂纹明显减少,表面光洁度明显提升。结果表明,该系统可以满足超声振动辅助微细电化学放电加工的要求,能够显著减小加工几何误差和工件的表面粗糙度值。

The fabrication of microstructures with high machining quality is always difficult when it is concerned with non-conductive hard and brittle materials such as glass and engineering ceramics.Related studies show that the electrochemical discharge machining(ECDM)process is a good selection.However,the machining quality of the ECDM process is in great need of improvement.To deal with this problem,the ultrasonic vibration assisted micro electrochemical discharge machining(UAECDM)tool is developed in this paper.Firstly,the machining principle of UAECDM is investigated and the hardware system is established.Secondly,the software system is developed based on the LabWindows/CVI visual development environment.Finally,contrast experiments are carried out including UAECDM drilling and ECDM drilling.In UAECDM group,the micro-hole with inlet diameter about 133.2μm is drilled on the glass workpiece with 300μm thickness,which has smaller inlet diameter as well as better inlet quality compared with the micro holes in ECDM group.It is proved that the machine tool can meet the requirement of ultrasonic vibration assisted micro electrochemical discharge machining and improve the surface quality obviously.