大气压双频氦气放电等离子体特性的数值研究

Numerical study of characteristics of atmospheric pressure helium plasma discharge driven by dual frequency power

用一维流体模型研究了大气压双频氦气放电等离子体的特性。数值模拟的结果表明,在单、双频放电中,随着应用电压的增加,电子密度和放电电流都增加。相对于单频放电,双频放电中低频源的耦合效应使得放电中的电流以及电子密度降低。随着低频源电压峰值的增加,电子密度降低,离子通量,电子损失能量以及电子吸收能量均降低;但电子温度和电势随着低频源电压峰值的增加而增加。在相同低频源电压下,随着高频源电压的增加离子流非线性增加。

Based on one dimensional fluid model,the characteristics of helium plasma discharge driven by dual frequency at atmospheric pressure were studied.The results show that the electron density and discharge current increase with power voltage both in single frequency discharge and dual frequency discharge.In comparison with single frequency discharge,the discharge current and electron density in dual frequency discharge are lowered due to the coupling of low frequency source.As the voltage of low frequency source increases,the electron density,ion flux,electron energy dissipation,as well as electron heating decrease,whereas electron temperature and potential increase.As the voltage of high frequency source increases,the ion flux nonlinearly increases at the same voltage of low frequency source.